Items where Author is "Göritz, A."

Stocchi, M. and Mencarelli, D. and Pierantoni, L. and Kot, D. and Lisker, M. and Göritz, A. and Kaynak, C. Baristiran and Wietstruck, M. and Kaynak, Mehmet (2019) Mid-infrared optical characterization of thin SiNx membranes. Applied Optics, 58 (19). pp. 5233-5239. ISSN 1559-128X (Print) 2155-3165 (Online)

Baristiran-Kaynak, Canan and Göritz, A. and Yamamoto, Y. and Wietstruck, M. and Stocchi, M. and Ünal, Kadir Eren and Özdemir, Mehmet Bora and Özsoy, Yusuf and Gürbüz, Yaşar and Kaynak, Mehmet (2019) Development and mechanical modeling of Si1-XGex/Si MQW based uncooled microbolometers in a 130 nm BiCMOS. In: 19th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), Orlando, FL, USA

Wipf, C. and Sorge, R. and Wipf, S. Tolunay and Göritz, A. and Scheit, A. and Kissinger, D. and Kaynak, Mehmet (2019) RF-MEMS based v-band impedance tuner driven by integrated high-voltage LDMOS switch matrix and charge pump. In: IEEE 19th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), Orlando, FL, USA

Baristiran Kaynak, C. and Yamamoto, Y. and Göritz, A. and Korndörfer, F. and Zaumseil, P. and Kulse, P. and Schulz, K. and Fraschke, M. and Marschmeyer, S. and Wolansky, D. and Wietstruck, M. and Shafique, Atia and Gürbüz, Yaşar and Kaynak, Mehmet (2018) Si1-xGex/Si MQW based uncooled microbolometer development and integration into 130 nm BiCMOS technology. In: 8th Symposium on SiGe, Ge, and Related Compounds: Materials, Processing, and Devices - AiMES 2018, ECS and SMEQ Joint International Meeting, Cancun, Mexico

Kaynak, C. Baristiran and Yamamoto, Y. and Göritz, A. and Korndörfera, F. and Zaumseil, P. and Kulse, P. and Schulz, K. and Wietstruck, M. and Costina, I. and Shafique, Atia and Gürbüz, Yaşar and Kaynak, Mehmet (2018) Pixel resistance optimization of a Si0.5Ge0.5/Si MQWs thermistor based on in-situ B doping for microbolometer applications. In: Infrared Technology and Applications XLIV 2018, Orlando, FL, USA

Wipf, C. and Sorge, R. and Göritz, A. and Wipf, S. Tolunay and Scheit, A. and Kissinger, D. and Kaynak, Mehmet (2018) High voltage LDMOS inverter for on-chip RF-MEMS actuation. In: IEEE 18th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), Anaheim, CA, USA

Wietstruck, M. and Marschmeyer, S. and Voß, T. and Inac, M. and Lisker, M. and Krüger, A. and Wolansky, D. and Kulse, P. and Schulz, K. and Katzer, J. and Göritz, A. and Mai, A. and Kaynak, Mehmet (2017) 200 mm silicon wafer with buried 3D etchstop layer for flexible-sized via-middle tsvs in a CMOS/BiCMOS technology (200 mm silizium wafer mit vergrabenen 3D-atzstoppschichten für flexible via-middle TSVs in CMOS/BiCMOS technologien). In: MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2017: MEMS, Microelectronics, Systems, Munchen

Tolunay Wipf, S. and Göritz, A. and Wietstruck, M. and Wipf, C. and Kaynak, Mehmet (2017) BiCMOS embedded RF-MEMS technologies (BiCMOS-integrierte HF-MEMS-technologien). In: MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2017: MEMS, Microelectronics, Systems, Munchen

Göritz, A. and Tolunay Wipf, S. and Wietstruck, M. and Mai, A. and Kaynak, Mehmet (2017) Process control for thin film encapsulation of BiCMOS RF-MEMS switches by means of the BEOL-integrated Pirani element (Prozesskontrolle für die dünnschichtverkapselung von BiCMOS HF-MEMS-schaltern mittels BEOL-integriertem Pirani-element). In: MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2017: MEMS, Microelectronics, Systems, Munchen