Tolunay Wipf, S. and Göritz, A. and Wietstruck, M. and Wipf, C. and Kaynak, Mehmet (2017) BiCMOS embedded RF-MEMS technologies (BiCMOS-integrierte HF-MEMS-technologien). In: MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2017: MEMS, Microelectronics, Systems, Munchen
Full text not available from this repository. (Request a copy)Abstract
This paper presents BiCMOS embedded RF-MEMS switch technologies for two technology lines, the 0.25 µm and the 0.13 µm SiGe BiCMOS. The developed RF-MEMS switch technologies include Single-Pole Single-Throw (SPST) and Single-Pole Double-Throw (SPDT) switches for mm-wave applications. The technologies offer two different packaging technologies for the RF-MEMS switches, namely Silicon cap packaging and thin film wafer-level encapsulation.
| Item Type: | Papers in Conference Proceedings |
|---|---|
| Divisions: | Faculty of Engineering and Natural Sciences |
| Depositing User: | Mehmet Kaynak |
| Date Deposited: | 23 Oct 2026 12:21 |
| Last Modified: | 23 Oct 2026 12:21 |
| URI: | https://research.sabanciuniv.edu/id/eprint/55591 |
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