Items where Author is "Marschmeyer, Steffen"

Article

Lisker, Marco and Marschmeyer, Steffen and Kaynak, Mehmet and Tekin, İbrahim (2011) A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8061-8067. ISSN 1533-4880

Papers in Conference Proceedings

Wietstruck, Matthias and Marschmeyer, Steffen and Schulze, Sebastian and Kaynak, Mehmet (2019) SiGe BiCMOS technology with embedded through-silicon vias and interposer fan-out wafer-level packaging platform. In: 2019 European Microwave Conference in Central Europe, EuMCE 2019, Prague

Wietstruck, Matthias and Marschmeyer, Steffen and Kulse, Philipp and Vob, Thomas and Lisker, Marco and Krüger, Andreas and Wolansky, Dirk and Fraschke, Mirko and Kaynak, Mehmet (2018) Development of a through-silicon via (TSV) process module for multi-project wafer SiGe BiCMOS and silicon interposer. In: IEEE 68th Electronic Components and Technology Conference (ECTC), San Diego, CA, USA