Embedded sacrificial layers for CMUT fabrication

Bardhan Roy, Rupak and Bozkurt, Ayhan and Farhanieh, Omid and Ergun, Arif Sanli (2015) Embedded sacrificial layers for CMUT fabrication. In: IEEE Sensors 2015 Conference, Busan, South Korea

Item Type:	Papers in Conference Proceedings
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Engineering and Natural Sciences > Academic programs > Electronics Faculty of Engineering and Natural Sciences
Depositing User:	Ayhan Bozkurt
Date Deposited:	21 Dec 2015 14:22
Last Modified:	26 Apr 2022 09:20
URI:	https://research.sabanciuniv.edu/id/eprint/28133

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