Design and realization of laser micromachining system

Official URL: http://192.168.1.20/record=b1378266 (Table of Contents)

The production process of miniature devices and microsystems requires the utilization of nonconventional micromachining techniques. In the past few decades laser micromachining has became an important micromanufacturing technique for many industrial and research applications. The popularity of this technique lies mostly in its noncontact nature. Unique characteristic of the laser micromachining is the possibility of etching or ablating exceptionally small features in many different materials with minimal damage done to the non irradiated regions of the material. For the purposes of achieving of precise and high quality laser micromachining and for full exploration of laser advantages as microprocessing tool, the development of reliable and easy to use laser micromachining system is of great importance. In this thesis, the design approach to the general purpose laser micromachining system is discussed. Detailed description of implementation of each module of the system is given. The designed laser micromachining system can be used for many microprocessing applications such as micromarking, microchannels machining, thin film cutting, etc. The design of the precise positioning planar x-y stage and trajectory generation and control method for this stage are discussed. The development of software and man machine interface for laser micromachining system is also presented. In order to verify the functional and operational capabilities of the designed system, precise aluminum marking, subsurface marking of glass, brass ablation and drilling of miniature holes in brass are preformed and experimental results are presented.