Design and control of laser micromachining workstation

Official URL: http://dx.doi.org/10.1109/AMC.2012.6197037

The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.