Embedded sacrificial layers for CMUT fabrication

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Bardhan Roy, Rupak and Bozkurt, Ayhan and Farhanieh, Omid and Ergun, Arif Sanli (2015) Embedded sacrificial layers for CMUT fabrication. In: IEEE Sensors 2015 Conference, Busan, South Korea

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Item Type:Papers in Conference Proceedings
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
ID Code:28133
Deposited By:Ayhan Bozkurt
Deposited On:21 Dec 2015 14:22
Last Modified:23 Aug 2019 13:00

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