Embedded sacrificial layers for CMUT fabrication

Bardhan Roy, Rupak and Bozkurt, Ayhan and Farhanieh, Omid and Ergun, Arif Sanli (2015) Embedded sacrificial layers for CMUT fabrication. In: IEEE Sensors 2015 Conference, Busan, South Korea

PDF - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader


Item Type:Papers in Conference Proceedings
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
ID Code:28133
Deposited By:Ayhan Bozkurt
Deposited On:21 Dec 2015 14:22
Last Modified:23 Aug 2019 13:00

Repository Staff Only: item control page