Items where Author is "Lisker, Marco"

Article

Lisker, Marco and Marschmeyer, Steffen and Kaynak, Mehmet and Tekin, İbrahim (2011) A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8061-8067. ISSN 1533-4880

Papers in Conference Proceedings

Krüger, Patrick and Wietstruck, Matthias and Kissinger, Gudrun and Lisker, Marco and Krüger, Andreas and Döhler, T. and Schäffner, Jan and Silz, Heike and Geißler, U. and Kaynak, Mehmet (2019) Development of a shear force measurement for qualitatively analyzation and optimization of wafer bonding processes [Entwicklung einer scherkraftmessung zur qualitativen analyse und optimierung von wafer bonding prozessen]. In: MikroSystemTechnik Kongress 2019: Mikroelektronik, MEMS-MOEMS, Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz - MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Ar, Berlin

Wietstruck, Matthias and Marschmeyer, Steffen and Kulse, Philipp and Vob, Thomas and Lisker, Marco and Krüger, Andreas and Wolansky, Dirk and Fraschke, Mirko and Kaynak, Mehmet (2018) Development of a through-silicon via (TSV) process module for multi-project wafer SiGe BiCMOS and silicon interposer. In: IEEE 68th Electronic Components and Technology Conference (ECTC), San Diego, CA, USA