Items where Author is "Lisker, Marco"

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Article

Lisker, Marco and Marschmeyer, Steffen and Kaynak, Mehmet and Tekin, İbrahim (2011) A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8061-8067. ISSN 1533-4880

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