Sayar Irani, Farid and Taşdelen, Melih Can and Yapıcı, Murat Kaya (2024) Scalable microfabrication of graphene polymeric strain Gauge. In: 36th European Conference on Solid-State Transducers (EUROSENSORS XXXVI), Hungary
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Official URL: http://dx.doi.org/10.5162/EUROSENSORSXXXVI/OT4.215
Abstract
This paper presents the fabrication and characterization of a strain gauge based on chemical vapor deposition (CVD)-grown graphene integrated to an epoxy-based, photo-patternable and flexible SU-8 cantilever for sensing applications. The fabrication process involved a standard semiconductor microfabrication process to create ser-pentine-shaped graphene and gold/graphene sensing layers on a polymeric SU-8 layer. The performance of the strain gauge was evaluated by subjecting it to controlled bending, demonstrating a gauge factor (GF) of 2.73 and fast response time (0.55 s) affirming the viability of the fabricated strain gauge for practical sensing applications.
| Item Type: | Papers in Conference Proceedings |
|---|---|
| Uncontrolled Keywords: | Pressure sensor, Microfabrication, Strain gauge, Graphene, SU8 |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics |
| Divisions: | Faculty of Engineering and Natural Sciences Sabancı University Nanotechnology Research and Application Center |
| Depositing User: | Murat Kaya Yapıcı |
| Date Deposited: | 04 Mar 2025 12:27 |
| Last Modified: | 04 Mar 2025 12:27 |
| URI: | https://research.sabanciuniv.edu/id/eprint/51111 |
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