Development of a novel silicon membrane MEMS capacitive pressure sensor for biological applications

Official URL: https://dx.doi.org/10.3390/CSAC2023-15170

MEMS capacitive pressure sensors have proven to be more reliable in terms of temperature drift and long-term stability when compared to MEMS piezoresistive pressure sensors. In this study, a MEMS capacitive pressure sensor using micromachined technology has been designed and fabricated. As the movable electrode, a silicon membrane is used, while the fixed electrode is a gold metal film on a glass substrate. There is no deformation of the silicon membrane when the pressure is equal on both sides. As a result of the pressure of 0 kPa applied to the silicon membrane, a capacitance exists between it and the metal electrode. Differences in pressure on both sides of the silicon membrane will cause the membrane to deform. Silicon membranes deform due to pressure differences, which affect the capacitance between metal electrodes and silicon membranes. MEMS capacitive pressure sensors benefit from the superior mechanical properties of silicon material compared to metal-based sensors. Capacitive MEMS sensors are more desirable for applications requiring high performance and stability as compared to metal pressure sensors. This device is suited to measuring blood pressure with a measurement range of 0–45 kPa. When applied pressure was 0 kPa, the measurement capacitance was 3.61 pF, and when 45 kPa was applied, it was 7.19 pF.