Efficient sensing of single viruses and nanoparticles by nanomechanical sensors integrated with ion lenses

Nanoelectromechanical Systems (NEMS) resonators can be used to detect, weigh and identify single nanoparticles and viruses. Given their small footprint, however, NEMS are plagued by low analyte detection rate since the active sensing cross-sections to capture analyte particles is very small. Here we report on the development of an on-chip focusing lens operating in air and integrated with the NEMS sensor. The integrated system increases the capture efficiency by orders of magnitude, and allows for operation under ambient conditions to measure the mass of nanoparticles and virions. With this system, mass spectrum of nanoparticle samples and mammalian viruses at biologically relevant concentrations can be characterized within less than 30 minutes.