Shafique, Atia and Durmaz, Emre Can and Çetindoğan, Barbaros and Yazıcı, Melik and Kaynak, Mehmet and Kaynak, Canan B. and Gürbüz, Yaşar (2016) Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems. In: 42th Conference on Infrared Technology and Applications XLII, Baltimore, MA
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Official URL: http://dx.doi.org/10.1117/12.2224778
Abstract
This paper presents the design, modelling and simulation results of silicon/silicon-germanium ( Si/SiGe) multi-quantum well based bolometer detector for uncooled infrared imaging system. The microbolometer is designed to detect light in the long wave length infrared ( LWIR) range from 8 to 14 mu m with pixel size of 25 x25 mu m. The design optimization strategy leads to achieve the temperature coefficient of resistance ( TCR) 4.5%/K with maximum germanium ( Ge) concentration of 50%. The design of microbolometer entirely relies on standard CMOS and MEMS processes which makes it suitable candidate for commercial infrared imaging systems.
| Item Type: | Papers in Conference Proceedings |
|---|---|
| Uncontrolled Keywords: | microbolometer; infrared imaging; thermal detector; Si/SiGe quantum well; temperature coefficient of resistance (TCR); hybrid integration; Long wavelength infrared (LWIR) |
| Divisions: | Faculty of Engineering and Natural Sciences > Academic programs > Electronics Faculty of Engineering and Natural Sciences |
| Depositing User: | Yaşar Gürbüz |
| Date Deposited: | 06 Sep 2016 10:06 |
| Last Modified: | 26 Apr 2022 09:23 |
| URI: | https://research.sabanciuniv.edu/id/eprint/29595 |
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