W-band silicon dielectric measurement

Seyyedesfahlan, Mirmehdi and Nemati, Mohammad Hossein and Tekin, İbrahim (2014) W-band silicon dielectric measurement. In: IEEE Antennas and Propagation Society International Symposium (APSURSI 2014), Memphis, TN

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In this paper, a free space based method for measurement of silicon dielectric constant is presented at W band frequencies. The dielectric constant of silicon is calculated using measured phase information of the transmitted signal (S21) through Silicon sheet of 500um thickness. Measured dielectric constant for silicon wafer has numerous fluctuations which come from multiple reflection and diffraction effect due to sharp edges.
Item Type: Papers in Conference Proceedings
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Engineering and Natural Sciences > Academic programs > Electronics
Faculty of Engineering and Natural Sciences
Depositing User: İbrahim Tekin
Date Deposited: 23 Dec 2014 10:21
Last Modified: 26 Apr 2022 09:16
URI: https://research.sabanciuniv.edu/id/eprint/25259

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