W-band silicon dielectric measurement

Official URL: http://dx.doi.org/10.1109/APS.2014.6904787

In this paper, a free space based method for measurement of silicon dielectric constant is presented at W band frequencies. The dielectric constant of silicon is calculated using measured phase information of the transmitted signal (S21) through Silicon sheet of 500um thickness. Measured dielectric constant for silicon wafer has numerous fluctuations which come from multiple reflection and diffraction effect due to sharp edges.