Micro position control of a 3-RRR compliant mechanism

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Acer, Merve and Şabanoviç, Asif (2013) Micro position control of a 3-RRR compliant mechanism. In: IEEE International Conference on Industrial Technology (ICIT 2013), Cape Town, South Africa

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Abstract

A 3-RRR compliant mechanism is designed to be used as a micro positioning stage. The stage displacements are analyzed by using structural FEA. However the experimental results for the manufactured mechanism are not compatible with the FEA which are mostly accepted as ideal while designing. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. The motion of the center is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has big errors in manufacturing, assembly etc.
Item Type: Papers in Conference Proceedings
Uncontrolled Keywords: 3-RRR mechanism; compliant mechanism; sliding mode control; piezoelectric actuator control; flexure based mechanism; observer
Subjects: T Technology > TJ Mechanical engineering and machinery > TJ163.12 Mechatronics
Divisions: Faculty of Engineering and Natural Sciences > Academic programs > Mechatronics
Faculty of Engineering and Natural Sciences
Depositing User: Asif Şabanoviç
Date Deposited: 14 Nov 2013 11:50
Last Modified: 26 Apr 2022 09:11
URI: https://research.sabanciuniv.edu/id/eprint/22057

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