Embedded sacrificial layers for CMUT fabrication

Bardhan Roy, Rupak and Bozkurt, Ayhan and Farhanieh, Omid and Ergun, Arif Sanli (2015) Embedded sacrificial layers for CMUT fabrication. In: IEEE Sensors 2015 Conference, Busan, South Korea

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Abstract

Item Type:	Papers in Conference Proceedings
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
ID Code:	28133
Deposited By:	Ayhan Bozkurt
Deposited On:	21 Dec 2015 14:22
Last Modified:	21 Dec 2015 14:22

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