Items where Author is "Krüger, Patrick"

Papers in Conference Proceedings

Krüger, Patrick and Wietstruck, Matthias and Kissinger, Gudrun and Lisker, Marco and Krüger, Andreas and Döhler, T. and Schäffner, Jan and Silz, Heike and Geißler, U. and Kaynak, Mehmet (2019) Development of a shear force measurement for qualitatively analyzation and optimization of wafer bonding processes [Entwicklung einer scherkraftmessung zur qualitativen analyse und optimierung von wafer bonding prozessen]. In: MikroSystemTechnik Kongress 2019: Mikroelektronik, MEMS-MOEMS, Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz - MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Ar, Berlin