Items where Author is "Ellinger, Frank"

Cao, Zhibo and Goritz, Alexander and Stocchi, Matteo and Wietstruck, Matthias and Hoyer, Christian and Steinweg, Luca David and Carta, Corrado and Ellinger, Frank and Tillack, Bernd and Kaynak, Mehmet (2022) An advanced finite element model for BiCMOS process oriented ultra-thin wafer deformation. IEEE Transactions on Semiconductor Manufacturing, 35 (1). pp. 2-10. ISSN 0894-6507 (Print) 1558-2345 (Online)