Microfabricated flexible 4×4 graphene thermistor array for spatial temperature mapping

Official URL: https://dx.doi.org/10.1109/LSENS.2026.3716836

In this letter, we report a MEMS-compatible 4×4 CVD graphene NTC thermistor array integrated on a 100 μm SU-8 substrate, extending a previously demonstrated single element design to a functional, spatially resolved temperature mapping array. A novel pad-sharing ring topology was implemented, halving the required contacts from 32 to 16, which reduced the packaging complexity and enabled a simple open pixel compensation mechanism. The array's capability to differentiate localized thermal gradients across a 5×5 mm2 sensing area was confirmed. NTC behavior with excellent linearity (R2>0.99) was observed across 30–100°C, with a mean β index of 83.17 K and a mean TCR of -0.0717%/°C, making the system a suitable candidate for wearable human thermometry applications.