Position-independent microparticle sensing: microwave sensors integrated with metalized, 3D microelectrodes

Alatas, Yagmur Ceren and Tefek, Uzay and Sarı, Burak and Hanay, Mehmet Selim (2023) Position-independent microparticle sensing: microwave sensors integrated with metalized, 3D microelectrodes. In: IEEE MTT-S International Microwave Biomedical Conference (IMBioC), Leuven, Belgium

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Microfluidics integrated microwave sensors can be used for high throughput and label-free sensing with single particle resolution. For microwave sensors with coplanar electrodes, electric field is nonuniform over the height of microfluidic channel, causing position dependent sensitivity. One way to resolve positional dependency is to place electrodes on the sidewalls of microfluidic channel to obtain uniform electric field. Here, we demonstrate a novel, metal coated 3D SU8 microelectrode integrated with microwave resonator to obtain uniform electric field inside microfluidic channel and mitigate position dependent sensitivity. SU8 electrodes are positioned at the sensing region of the resonator, in contact with the microfluidic channel walls. During microparticle sensing experiments, phase and amplitude of the resonator are tracked using custom built single side band detection circuitry to detect particle induced shifts in these signals. Results of particle sensing, and size classification experiments indicate that with 3D SU8 electrode integrated microwave resonators, position-independent sensitivity can be achieved.
Item Type: Papers in Conference Proceedings
Uncontrolled Keywords: microfluidics; microwave resonator; position-independent sensing; SU8 microelectrodes
Divisions: Faculty of Engineering and Natural Sciences > Academic programs > Electronics
Faculty of Engineering and Natural Sciences
Depositing User: Burak Sarı
Date Deposited: 08 Feb 2024 14:35
Last Modified: 08 Feb 2024 14:35
URI: https://research.sabanciuniv.edu/id/eprint/48835

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