Soft SU-8 thermal bimorph actuators with large out-of-plane deflection

Hosseinpour Shafaghi, Ali and Abdul, Basit and Bajwa, Rayan and Sayar Irani, Farid and Yapıcı, Murat Kaya (2023) Soft SU-8 thermal bimorph actuators with large out-of-plane deflection. In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), Valetta, Malta

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Thermal actuators are useful for precise and reliable control in various applications such as flow control, MEMS, robotics, and biology. However, existing actuators often suffer from large power consumption, slow response, and limited scalability, which limits their application particularly in underwater systems. Herein, we present the design and fabrication of SU-8 based thermal bimorph actuators having fast response and large out-of-plane deflection at low power levels, making them an ideal candidate for underwater applications. The time response and deflection of the thermal actuators were optimized by carefully tailoring the actuator geometry. We have verified the effectiveness of proposed actuators via computational and experimental results, which indicate that more than 60 μm out-of-plane deflection could be obtained at around 35 mW input power, with actuation time as low as 200 ms.
Item Type: Papers in Conference Proceedings
Uncontrolled Keywords: biocompatible; microfabrication; modeling; polymer; SU-8; thermal actuator; thermal bimorph
Divisions: Faculty of Engineering and Natural Sciences
Depositing User: Ali Hosseinpour Shafaghi
Date Deposited: 07 Feb 2024 15:22
Last Modified: 07 Feb 2024 15:22

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