Rubidium focused ion beam induced platinum deposition

Li, Y. and Xu, S. and Sezen, Meltem and Bakan Mısırlıoğlu, Feray and Vredenbregt, E. J. D. (2023) Rubidium focused ion beam induced platinum deposition. Journal of Vacuum Science and Technology B, 41 (4). ISSN 2166-2746 (Print) 2166-2754 (Online)

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This work presents characterization of focused ion beam induced deposition (FIBID) of platinum using both rubidium and gallium ions. Trimethylplatinum [ ( MeCp ) Pt ( Me ) 3 ] was used as the deposition precursor. Under similar beam energies, 8.5 keV for R b + and 8.0 keV for G a + , and beam current, near 10 pA, the two ion species deposited Pt films at 0.90 and 0.73 μ m 3 / nC , respectively. Energy-dispersive x-ray spectroscopy shows that R b + FIBID-Pt consists of similar Pt contents (49% for R b + FIBID and 37% for G a + FIBID) with much lower primary ion contents (5% Rb and 27% Ga) than G a + FIBID-Pt. The deposited material was also measured to have a resistivity of 8.1 × 10 4 μ Ω cm for the R b + FIBID-Pt and 5.7 × 10 3 μ Ω cm for G a + FIBID-Pt.
Item Type: Article
Divisions: Sabancı University Nanotechnology Research and Application Center
Depositing User: Meltem Sezen
Date Deposited: 07 Aug 2023 16:07
Last Modified: 07 Aug 2023 16:07

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