Fabrication and materials integration of flexible humidity sensors for emerging applications

Delipınar, Tuğçe and Shafique, Atia and Sepehri Gohar, Maryam and Yapıcı, Murat Kaya (2021) Fabrication and materials integration of flexible humidity sensors for emerging applications. ACS Omega, 6 (13). pp. 8744-8753. ISSN 2470-1343

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In the past decade, humidity measurements have ubiquitously gained consideration in the wide range of application paradigms such as industrial predictive maintenance, instrumentation, automation, agriculture, climate monitoring, healthcare, and semiconductor industries. Accurate humidity measurements and cost-effective fabrication processes for large-volume and high-performance sensors with flexible form factors are essential to meet the stringent performance requirements of the emerging application areas. To address this need, recent efforts focus on development of innovative sensing modalities, process technologies, and exploration and integration of new materials to enable low-cost, robust, and flexible humidity sensors with ultrahigh sensitivity and linearity, large dynamic range, low hysteresis, and fast response time. In this review paper, we present an overview of flexible humidity sensors based on distinct sensing mechanisms, employed processing techniques, and various functional sensing layers and substrate materials for specific applications. Furthermore, we present the critical device design parameters considered to be indicative of sensor performance such as relative humidity range, along with a discussion on some of the specific applications and use cases.
Item Type: Article
Divisions: Faculty of Engineering and Natural Sciences
Sabancı University Nanotechnology Research and Application Center
Depositing User: Murat Kaya Yapıcı
Date Deposited: 03 Sep 2022 20:56
Last Modified: 03 Sep 2022 20:56
URI: https://research.sabanciuniv.edu/id/eprint/43470

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