Electro-optical performances of nanostructured SrTiOx films: the effect of plasma power, Ar/O-2 ratio and annealing

Goldenberg, Eda and Bayrak, Türkan and Mohammad Moradi, Omid (2021) Electro-optical performances of nanostructured SrTiOx films: the effect of plasma power, Ar/O-2 ratio and annealing. International Journal of Applied Ceramic Technology, 18 (3). pp. 631-642. ISSN 1546-542X (Print) 1744-7402 (Online)

Full text not available from this repository. (Request a copy)


The present work evaluates the effects of plasma power and oxygen mixing ratios (OMRs) on structural, morphological, optical, and electrical properties of strontium titanate SrTiOx (STO) thin films. STO thin films were grown by magnetron sputtering, and later thermal annealing at 700°C for 1 h was applied to improve film properties. X-ray diffraction analysis indicated that as-deposited films have amorphous microstructure independent of deposition conditions. The films deposited at higher OMR values and later annealed also showed amorphous structure while the films deposited at lower OMR value and annealed have nanocrystallinity. In addition, all as-deposited films were highly transparent (~80%–85%) in the visible spectrum and exhibited well-defined main absorption edge, while the annealing improved transparency (90%) within the same spectrum. The calculated direct and indirect optical band gaps for films were in the range of 3.60-4.30 eV as a function of deposition conditions. The refractive index of the films increased with OMRs and the postdeposition annealing. The frequency dependent capacitance measurements at 100 kHz were performed to obtain film dielectric constant values. High dielectric constant values reaching up to 100 were obtained. All STO samples exhibited more than 2.5 μC/cm2 charge storage capacity and low dielectric loss (less than 0.07 at 100 kHz). The leakage current density was relatively low (3 × 10−8Acm−2 at +0.8 V) indicating that STO films are promising for future dynamic random access memory applications.
Item Type: Article
Uncontrolled Keywords: charge storage capacity; dielectric constant; electrical properties; optical properties; oxide thin films; strontium titanate
Divisions: Faculty of Engineering and Natural Sciences > Academic programs > Materials Science & Eng.
Faculty of Engineering and Natural Sciences
Sabancı University Nanotechnology Research and Application Center
Depositing User: EDA GOLDENBERG
Date Deposited: 18 Aug 2022 20:16
Last Modified: 18 Aug 2022 20:16
URI: https://research.sabanciuniv.edu/id/eprint/43296

Actions (login required)

View Item
View Item