Frequency-dependent piezoresistive effect in top-down fabricated gold nanoresistors

Ti, Chaoyang and Ari, Atakan and Karakan, Çağatay and Yanık, Cenk and Kaya, İsmet İnönü and Hanay, Selim and Svitelskiy, Oleksiy and González, Miguel and Seren, Huseyin and Ekinci, Kamil (2021) Frequency-dependent piezoresistive effect in top-down fabricated gold nanoresistors. Nano Letters, 21 (15). pp. 6533-6539. ISSN 1530-6984 (Print) 1530-6992 (Online)

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Abstract

Piezoresistive strain gauges allow for electronic readout of mechanical deformations with high fidelity. As piezoresistive strain gauges are aggressively being scaled down for applications in nanotechnology, it has become critical to investigate their physical attributes at different limits. Here, we describe an experimental approach for studying the piezoresistive gauge factor of a gold thin-film nanoresistor as a function of frequency. The nanoresistor is fabricated lithographically near the anchor of a nanomechanical doubly clamped beam resonator. As the resonator is driven to resonance in one of its normal modes, the nanoresistor is exposed to frequency-dependent strains of ε ≲ 10–5 in the 4–36 MHz range. We calibrate the strain using optical interferometry and measure the resistance changes using a radio frequency mix-down technique. The piezoresistive gauge factor γ of our lithographic gold nanoresistors is γ ≈ 3.6 at 4 MHz, in agreement with comparable macroscopic thin metal film resistors in previous works. However, our γ values increase monotonically with frequency and reach γ ≈ 15 at 36 MHz. We discuss possible physics that may give rise to this unexpected frequency dependence.
Item Type: Article
Uncontrolled Keywords: Piezoresistive effect, piezoresistive gauge factor, gold nanowire, gold nanoresistor, NEMS
Subjects: Q Science > QC Physics > QC176-176.9 Solids. Solid state physics
Divisions: Faculty of Engineering and Natural Sciences > Basic Sciences > Physics
Faculty of Engineering and Natural Sciences
Depositing User: İsmet İnönü Kaya
Date Deposited: 22 Aug 2021 10:34
Last Modified: 22 Aug 2021 10:34
URI: https://research.sabanciuniv.edu/id/eprint/41782

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