Micro position control of a designed 3-PRR compliant mechanism using experimental models

Acer, Merve and Şabanoviç, Asif (2013) Micro position control of a designed 3-PRR compliant mechanism using experimental models. In: 9th Asian Control Conference (ASCC 2013), Istanbul, Turkey

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A new compliant stage based on 3-PRR kinematic structure is designed to be used as a planar micro positioner. The mechanism is actuated by using piezoelectric actuators and center position of the stage is measured using a dual laser position sensor. It's seen that manufactured mechanism has unpredictable motion errors due to manufacturing and assembly faults. Thus, sliding mode control with disturbance observer is chosen to be implemented as position control in x-y axes of the center of the mechanism. Instead of piezoelectric actuator models, experimental models are extracted for each actuation direction in order to be used as nominal plants for the disturbance observer. The position control results are compared with the previous position control using linear piezoelectric actuator models and it's seen that the implemented control methodology is better in terms of errors in x and y axes. Besides, the position errors are lowered down to ±0.06 microns, which is the accuracy of the dual laser position sensor.
Item Type: Papers in Conference Proceedings
Uncontrolled Keywords: compliant mechanism; micro motion mechanisms; observer; piezoelectric actuator; sliding mode control
Subjects: T Technology > TJ Mechanical engineering and machinery > TJ163.12 Mechatronics
Divisions: Faculty of Engineering and Natural Sciences > Academic programs > Mechatronics
Faculty of Engineering and Natural Sciences
Depositing User: Asif Şabanoviç
Date Deposited: 14 Nov 2013 11:56
Last Modified: 26 Apr 2022 09:11
URI: https://research.sabanciuniv.edu/id/eprint/22058

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