Mechanical and thermal modeling of an uncooled microbolometer

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Kaynak, C. B. and Goritz, A. and Yamamoto, Y. and Wietstruck, M. and Stocchi, M. and Ünal, Kadir Eren and Özdemir, Mehmet Bora and Özsoy, Yusuf and Gürbüz, Yaşar and Kaynak, Mehmet (2019) Mechanical and thermal modeling of an uncooled microbolometer. In: European Microwave Conference in Central Europe (EuMCE), Prague, Czech Republic

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This paper presents the development of mechanical and thermal modeling of an uncooled microbolometer based on finite-element-method (FEM) simulations. After having mechanical modeling and validation on the cantilever beam structure to be used as supporting arm of the microbolometer, the full microbolometer is modeled and fabricated. Maximum equivalent stress, maximum deformation in different planes, thermal conductance and thermal time constant on the microbolometers are extracted. The simulations show that the chosen microbolometer design shows a very good mechanical stability and performance while it is in a good agreement with the fabricated microbolometer devices.

Item Type:Papers in Conference Proceedings
ID Code:40243
Deposited By:Yaşar Gürbüz
Deposited On:18 Sep 2020 09:35
Last Modified:18 Sep 2020 09:35

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