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Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

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Kemal, Remzi Erkan and Bozkurt, Ayhan and Yaralıoğlu, Goksen Goksenin (2020) Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances. Microsystem Technologies . ISSN 0946-7076 (Print) 1432-1858 (Online) Published Online First http://dx.doi.org/10.1007/s00542-020-04849-y

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Official URL: http://dx.doi.org/10.1007/s00542-020-04849-y

Abstract

Equivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.

Item Type:Article
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
ID Code:40128
Deposited By:Ayhan Bozkurt
Deposited On:15 Sep 2020 18:45
Last Modified:15 Sep 2020 18:45

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