Self induced crystallinity in RF magnetron sputtered ZnO thin films
Özen, I. and Gülgün, Mehmet Ali and Özcan, Meriç (2004) Self induced crystallinity in RF magnetron sputtered ZnO thin films. Key Engineering Materials, 264-268 . pp. 1225-1228. ISSN 1013-9826
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ZnO films were coated on the order of micrometer thickness on various substrates using RF magnetron sputtering. Glass, mica and Si were used as amorphous and crystalline substrates to study film growth. X-ray diffraction measurements revealed a self-induced, (002) oriented texture on all substrates. Effects of residual stresses on growth behavior and possible mechanisms of textured crystallization on crystalline and amorphous substrates are discussed.
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