Monolithically fabricated mems-driven beam steerable antenna system for KA-band networks

Official URL: https://dx.doi.org/10.1109/MEMS64181.2026.11419349

Miniaturized beam-steerable antenna systems are crucial for 5G (5th generation) communication networks with stringent transmission and size requirements, especially in portable, hand-held devices. In this work, we demonstrate wafer-level integration of MEMS technology with antenna arrays to generate multi-spot beams using passive beam forming networks (BFNs) for Ka-band applications. Our antenna system consists of a 2 × 2 patch array fed through a passive BFN network with two 3 dB/ 90° couplers and two single pole double throw (SPDT) MEMS switches, all co-fabricated on a 0.254 mm thick glass substrate. By controlling switching, we 30° beam steering in the H-plane, while maintaining extremely low power operation, small form factor and excellent radio frequency (RF) characteristics, compared to existing active or passive BFNs. This is enabled by our MEMS switch technology that displays low insertion loss (<1 dB), high isolation (>20 dB), and near-zero static power, making it an excellent choice alternative to active switching components e.g., PIN diodes, that are lossy, power hungry, and have limited linearity, particularly at 5 G frequencies. The proof-of-concept we demonstrate here underscores the importance of MEMS integration in upcoming 5 G/ 6 G networks, requiring miniaturized reconfigurable antenna systems with high gain.