Dual-oscillator NEMS based hydrogen detection

Jiang, W. G. and Ma, Monan and Gress, Hagen and Kaya, İsmet İnönü and Hanay, M. S. and Ekinci, Kamil L. and Gonzalez, Miguel (2025) Dual-oscillator NEMS based hydrogen detection. In: IEEE Sensors, Vancouver, BC, Canada

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Abstract

A dual-oscillator NEMS platform was studied as a hydrogen sensor, where we used one AuPd-coated beam as the hydrogen detector and an uncoated beam as reference. We conducted a statistical comparison between their resonance frequency shifts, and isolated the hydrogen-induced signal. We measured the saturated frequency shift in hydrogen samples with concentration levels ranging from 16 ppm to 50000 ppm. Response times, t90, ranged from 45 s to 186 min at the highest and lowest concentrations, respectively. The device showed promise for hydrogen detection at ppm levels.
Item Type: Papers in Conference Proceedings
Uncontrolled Keywords: gold palladium; hydrogen sensor; NEMS
Divisions: Faculty of Engineering and Natural Sciences
Depositing User: İsmet İnönü Kaya
Date Deposited: 05 May 2026 14:43
Last Modified: 05 May 2026 14:43
URI: https://research.sabanciuniv.edu/id/eprint/53963

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