Özen, I. and Gülgün, Mehmet Ali and Özcan, Meriç (2004) Self induced crystallinity in RF magnetron sputtered ZnO thin films. Key Engineering Materials, 264-26 . pp. 1225-1228. ISSN 1013-9826
Full text not available from this repository. (Request a copy)Abstract
ZnO films were coated on the order of micrometer thickness on various substrates using RF magnetron sputtering. Glass, mica and Si were used as amorphous and crystalline substrates to study film growth. X-ray diffraction measurements revealed a self-induced, (002) oriented texture on all substrates. Effects of residual stresses on growth behavior and possible mechanisms of textured crystallization on crystalline and amorphous substrates are discussed.
| Item Type: | Article |
|---|---|
| Additional Information: | Conference Information: 8th Conference of the European-Ceramic-Society Istanbul, TURKEY, JUN 29-JUL 03, 2003 Turkish Ceram Soc; European Ceram Soc |
| Uncontrolled Keywords: | ZnO; thin films; RF magnetron sputtering; crystallinity; epitaxy |
| Subjects: | Q Science > Q Science (General) |
| Divisions: | Faculty of Engineering and Natural Sciences |
| Depositing User: | Meriç Özcan |
| Date Deposited: | 20 Feb 2007 02:00 |
| Last Modified: | 26 Apr 2022 08:08 |
| URI: | https://research.sabanciuniv.edu/id/eprint/478 |
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