title   
  

Creator/Author/Editor: Lisker, Marco

2011

Lisker, Marco and Marschmeyer, Steffen and Kaynak, Mehmet and Tekin, İbrahim (2011) A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias. Journal of Nanoscience and Nanotechnology , 11 (9). pp. 8061-8067. ISSN 1533-4880

This list was generated on Wed Aug 27 15:07:00 2014 EEST.