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Tool capacity planning in semiconductor manufacturing

Çatay, Bülent and Erengüç, Ş. Selçuk and Vakharia, Asoo J. (2003) Tool capacity planning in semiconductor manufacturing. Computers & Operations Research, 30 (9). pp. 1349-1366. ISSN 0305-0548

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Official URL: http://dx.doi.org/10.1016/S0305-0548(02)00075-8

Abstract

The demand for distinct wafer types in semiconductor manufacturing is an explicit function of the electronic components in which these wafers are used. Given that the component demands vary not only by the product type but also over time, it is obvious that wafer demands are also lumpy and time varying. In this paper, we discuss strategic level investment decisions on procuring new equipment and aggregate level capacity planning. In this context, we examine the problem of planning wafer production over multiple time periods within a single facility assuming that a demand forecast for each wafer type for each period is known. To address this problem, we develop a multi-period mixed integer programming model to minimize the machine tool operating costs, new tool acquizition costs, and inventory holding costs. Given that production of wafers requires a large number of operations with multiple tools capable of performing each operation, tool operating costs are explicitly minimized by integrating the assignment of specific operations to tools in our model. Since our model is computationally intractable, we propose a Lagrangean-based relaxation heuristic to find efficient tool procurement plans.

Item Type:Article
Uncontrolled Keywords:Production planning; Semiconductor manufacturing; Capacity planning; Mathematical programming; Lagrangean relaxation
Subjects:T Technology > TS Manufactures
ID Code:8603
Deposited By:Bülent Çatay
Deposited On:08 Jun 2008 17:14
Last Modified:25 May 2011 14:03

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