Diamond microelectronic gas sensor for detection of benzene and toluene

Abstract

We have applied diamond chemical sensor to detect benzene (C6H6) and toluene (C7H8), volatile organic compounds and possible indication of environmental hazard and petroleum in soil/subsoil. Steady-state and transient responses of the sensor for both gases have been studied. These studies have shown that the sensor shows a large sensitivity, fast response, high selectivity, wider dynamic range, repeatable/reproducible response for benzene and toluene gases. The detection mechanisms of the sensor for both gases have been analyzed and models have been developed. Activation energy analysis of the sensor for both gases resulted in a very small values, confirming fast response and high sensitivity. Furthermore, the effects of structural properties of the sensor and temperature on gas sensing performance have been studied and a structurally optimum sensor has been presented in this study.