Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems
Shafique, Atia and Durmaz, Emre Can and Çetindoğan, Barbaros and Yazıcı, Melik and Kaynak, Mehmet and Kaynak, Canan B. and Gürbüz, Yaşar (2016) Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems. In: 42th Conference on Infrared Technology and Applications XLII, Baltimore, MA
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Official URL: http://dx.doi.org/10.1117/12.2224778
This paper presents the design, modelling and simulation results of silicon/silicon-germanium ( Si/SiGe) multi-quantum well based bolometer detector for uncooled infrared imaging system. The microbolometer is designed to detect light in the long wave length infrared ( LWIR) range from 8 to 14 mu m with pixel size of 25 x25 mu m. The design optimization strategy leads to achieve the temperature coefficient of resistance ( TCR) 4.5%/K with maximum germanium ( Ge) concentration of 50%. The design of microbolometer entirely relies on standard CMOS and MEMS processes which makes it suitable candidate for commercial infrared imaging systems.
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