W-band silicon dielectric measurement
Seyyedesfahlan, Mirmehdi and Nemati, Mohammad Hossein and Tekin, İbrahim (2014) W-band silicon dielectric measurement. In: IEEE Antennas and Propagation Society International Symposium (APSURSI 2014), Memphis, TN
Official URL: http://dx.doi.org/10.1109/APS.2014.6904787
In this paper, a free space based method for measurement of silicon dielectric constant is presented at W band frequencies. The dielectric constant of silicon is calculated using measured phase information of the transmitted signal (S21) through Silicon sheet of 500um thickness. Measured dielectric constant for silicon wafer has numerous fluctuations which come from multiple reflection and diffraction effect due to sharp edges.
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