Control of the graphene growth rate on capped SiC surface under strong Si confinement

Çelebi, Cem and Yanık, Cenk and Günay Demirkol, Anıl and Kaya, İsmet İnönü (2013) Control of the graphene growth rate on capped SiC surface under strong Si confinement. Applied Surface Science, 264 . pp. 56-60. ISSN 0169-4332

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Abstract

The effect of the degree of Si confinement on the thickness and morphology of UHV grown epitaxial graphene on (0 0 0 −1) SiC is investigated by using atomic force microscopy and Raman spectroscopy measurements. Prior to the graphene growth process, the C-face surface of a SiC substrate is capped by another SiC comprising three cavities on its Si-rich surface with depths varying from 0.5 to 2 microns. The Si atoms, thermally decomposed from the sample surface during high temperature annealing of the SiCcap/SiCsample stack, are separately trapped inside these individual cavities at the sample/cap interface. Our analyses show that the growth rate linearly increases with the cavity height. It was also found that stronger Si confinement yields more uniform graphene layers.
Item Type: Article
Uncontrolled Keywords: graphene; silicon carbide; Epitaxial graphene; SiC; Raman spectroscopy
Divisions: Sabancı University Nanotechnology Research and Application Center
Faculty of Engineering and Natural Sciences > Basic Sciences > Physics
Faculty of Engineering and Natural Sciences
Depositing User: İsmet İnönü Kaya
Date Deposited: 03 Jul 2013 11:57
Last Modified: 11 Aug 2018 12:13
URI: https://research.sabanciuniv.edu/id/eprint/21663

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