title   
  

Control of the graphene growth rate on capped SiC surface under strong Si confinement

Çelebi, Cem and Yanık, Cenk and Günay Demirkol, Anıl and Kaya, İsmet İnönü (2013) Control of the graphene growth rate on capped SiC surface under strong Si confinement. Applied Surface Science, 264 . pp. 56-60. ISSN 0169-4332

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Official URL: http://dx.doi.org/10.1016/j.apsusc.2012.09.103

Abstract

The effect of the degree of Si confinement on the thickness and morphology of UHV grown epitaxial graphene on (0 0 0 −1) SiC is investigated by using atomic force microscopy and Raman spectroscopy measurements. Prior to the graphene growth process, the C-face surface of a SiC substrate is capped by another SiC comprising three cavities on its Si-rich surface with depths varying from 0.5 to 2 microns. The Si atoms, thermally decomposed from the sample surface during high temperature annealing of the SiCcap/SiCsample stack, are separately trapped inside these individual cavities at the sample/cap interface. Our analyses show that the growth rate linearly increases with the cavity height. It was also found that stronger Si confinement yields more uniform graphene layers.

Item Type:Article
Uncontrolled Keywords:graphene; silicon carbide; Epitaxial graphene; SiC; Raman spectroscopy
Subjects:UNSPECIFIED
ID Code:21663
Deposited By:İsmet İnönü Kaya
Deposited On:03 Jul 2013 11:57
Last Modified:23 May 2015 12:53

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