title   
  

An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode

Ölçüm, Selim and Yamaner, Yalçın Feysel and Bozkurt, Ayhan and Köymen, Hayrettin and Atalar, Abdullah (2011) An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 58 (7). pp. 1468-1477. ISSN 0885-3010

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Official URL: http://dx.doi.org/10.1109/TUFFC.2011.1966

Abstract

The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs.

Item Type:Article
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK1-4661 Electrical engineering. Electronics Nuclear engineering
ID Code:17303
Deposited By:Ayhan Bozkurt
Deposited On:26 Oct 2011 15:11
Last Modified:14 Nov 2011 14:20

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