title   
  

Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation

Güldiken, Rasim O. and Zahorian, Jaime and Yamaner, Yalçın Feysel and Değertekin, F. Levent (2009) Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 56 (6). pp. 1270-1276. ISSN 0885-3010

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Official URL: http://dx.doi.org/10.1109/TUFFC.2009.1169

Abstract

In this paper, we report measurement results on dual-electrode CMUT demonstrating electromechanical coupling coefficient (k(2)) of 0.82 at 90% of collapse voltage as well as 136% 3 dB one-way fractional bandwidth at the transducer surface around the design frequency of 8 MHz. These results are within 5% of the predictions of the finite element simulations. The large bandwidth is achieved mainly by utilizing a non-uniform membrane, introducing center mass to the design, whereas the dual-electrode structure provides high coupling coefficient in a large dc bias range without collapsing the membrane. In addition, the non-uniform membrane structure improves the transmit sensitivity of the dual-electrode CMUT by about 2dB as compared with a dual electrode CMUT with uniform membrane.

Item Type:Article
Subjects:UNSPECIFIED
ID Code:13674
Deposited By:Yalçın Feysel Yamaner
Deposited On:13 Jan 2010 21:51
Last Modified:25 May 2011 14:12

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