Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation
Güldiken, Rasim O. and Zahorian, Jaime and Yamaner, Yalçın Feysel and Değertekin, F. Levent (2009) Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 56 (6). pp. 1270-1276. ISSN 0885-3010
Full text not available from this repository.
Official URL: http://dx.doi.org/10.1109/TUFFC.2009.1169
In this paper, we report measurement results on dual-electrode CMUT demonstrating electromechanical coupling coefficient (k(2)) of 0.82 at 90% of collapse voltage as well as 136% 3 dB one-way fractional bandwidth at the transducer surface around the design frequency of 8 MHz. These results are within 5% of the predictions of the finite element simulations. The large bandwidth is achieved mainly by utilizing a non-uniform membrane, introducing center mass to the design, whereas the dual-electrode structure provides high coupling coefficient in a large dc bias range without collapsing the membrane. In addition, the non-uniform membrane structure improves the transmit sensitivity of the dual-electrode CMUT by about 2dB as compared with a dual electrode CMUT with uniform membrane.
Repository Staff Only: item control page