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Realization of Micromachined-Microelectromechanical Devices for Multiband/Tunable RF-Circuit Applications

Heves, Emre and Gürbüz, Yaşar (2008) Realization of Micromachined-Microelectromechanical Devices for Multiband/Tunable RF-Circuit Applications. (Submitted)

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Abstract

In this work, MEMS based parallel plate variable capacitor, micromachined-inductor and LC filter that is formed by combining these two are presented. Parallel plate variable capacitor is designed as tuned with 8V, yet its tuning voltage increased around 50 V due to high tensile stress. However its tuning range increased to %300 related to the tensile stress resulting bended beam structure. The capacitance changes from 87fF to 260fF with the voltages from 0V to 55V. Additionally, inductors are designed, fabricated using same process steps. They achieve 1.5 to 2 nH inductance values and quality factors from 5 to 10. These designed inductor and variable capacitor are combined to form an LC filter whose center frequency changes form 8.194 GHz to 6.192 GHz with applied voltages from 0V to 30V.

Item Type:Article
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
ID Code:10436
Deposited By:Yaşar Gürbüz
Deposited On:10 Nov 2008 15:12
Last Modified:13 Apr 2009 14:58

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